화학공학소재연구정보센터
Thin Solid Films, Vol.431-432, 63-67, 2003
Single source precursors for fabrication of I-III-VI2 thin-film solar cells via spray CVD
The development of thin-film solar cells on flexible, lightweight, space-qualified substrates provides an attractive cost solution to fabricating solar arrays with high specific power (W/kg). Thin-film fabrication studies demonstrate that ternary single source precursors can be used in either a hot, or cold-wall spray chemical vapour deposition reactor, for depositing CuInS2, CuGaS2 and CuGaInS2 at reduced temperatures (400-450 degreesC), which display good electrical and optical properties suitable for photovoltaic devices. X-ray diffraction studies, energy dispersive spectroscopy and scanning electron microscopy confirmed the formation of the single phase CIS, CGS, CIGS thin-films on various substrates at reduced temperatures. (C) 2003 Elsevier Science B.V. All rights reserved.