Titanium metal powder mixed with 2-5.5 wt.% iron powder was flowed on Ar gas stream and evaporated in the RF plasma with gas mixture of Ar and O-2. The spherical iron doped TiO2 powder with colour of pinkish white was obtained. Transmission electron microscope (TEM) analysis of the doped particles showed the periodic planer arrangement of iron atoms at empty space of TiO2 crystals. In the case of Al doped particles, the lattice image presenting the mosaic-like structure is predominantly seen at the (110) lattice image. The difference of the segregation of Fe and Al in rutile particles has been discussed as the intrinsic nature of Fe and Al atoms. (C) 2003 Elsevier Science B.V. All rights reserved.