화학공학소재연구정보센터
Journal of Materials Science, Vol.38, No.12, 2559-2562, 2003
Optical and electrical properties of carbon nitride films deposited by cathode electrodeposition
Carbon nitride (CNx) films were prepared on silicon (100) wafers and ITO conductive glasses by cathode electrodeposition, using dicyandiamide (C2H4N4) in acetone as precursors. The composition ratios (N/C) were approximated to or larger than 1 from XPS. The optical properties and electrical resistivities of the films were investigated. Intense PL with two bands in the range 2.5-3.5 eV was observed on the CNx films. The band gaps (E-opt) deduced from measurements of the optical absorption coefficients in the UV-VIS spectra were found to be in the range of 1.1-1.6 eV. From the PL and UV-VIS spectra, the nitrogen content has a large effect on the PL band gap and E-opt. The electrical resistivities of the films on Si wafers are in the 10(9)-10(10) Omega . cm range. (C) 2003 Kluwer Academic Publishers.