Sn-Zr and Ag-doped Sn-Zr thin films were prepared by an electron-beam evaporation method using pure separate metal sources. Electrochemical cycling performance was obtained as a function of film composition. The cycling stability of Sn-Zr film electrodes increased with Zr content. An Ag-doped Sn-Zr thin film such as Sn57Zr33Ag10 showed excellent cycling stability and capacity retention. The composition dependence on electrochemical behavior is related to the microstructural changes in the films. (C) 2003 Elsevier Science B.V. All rights reserved.