We present preliminary results on a microfabrication approach to enable the integration of high yield, uniform, and preferential growth of vertically aligned carbon nanotubes (VACNTs) on low-stress micromechanical. structures using a combination of "electron-beam crosslinked" poly (methylmethacrylate) surface nanomachining and direct current plasma enhanced chemical vapor deposition of electric-field-aligned carbon nanotubes. In this article, selective placement of high yield and uniform VACNTs on a partially suspended Ni/SiO2/Ti microstructure has been demonstrated. (C) 2003 American Vacuum Society.