화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Polymer(Korea), Vol.28, No.1, 3-9, January, 2004
Export Citation
자체조립 단일막으로 코팅된 실리콘 기판의 표면특성
Surface Characteristics of Silicon Substrates Coated with Self-assembled Mono-layers
최성훈, 강호종†
  • 단국대학교 기능성고분자 신소재연구센터, 고분자공학과
Seong-Hun Choi, and Ho-Jong Kang†
  • Center for Advanced Functional Polymers, Department of Polymer Science and Engineering, Dankook University, #8 Hannam-dong, Yongsan-gu, Seoul 140-714, Korea
E-mail:
초록
미세전자-기계계(MEMS)의 윤활 막으로 적용되는 자체조립 단일막(SAMs) 형성을 위하여 실란 변성 퍼플루오로폴리에테르(SPFPE)를 합성하고 이를 실리콘 표면에 코팅하여, 형성된 SAMs에 의한 표면 특성 변화를 기존의 퍼플루오로폴리에테르 (PFPF), 옥타데실트리클로로실란 (OTS), 그리고 퍼플루오로옥틸트리클로로실란 (FOTS) SAMs와 비교 검토하였다. SPFPE에 의해 형성된 SAMs는 실리콘 표면과의 느린 반응성에 의하여 OTS와 FOTS와 비교하여 상대적으로 낮은 소수성을 가지나 열처리에 의하여 이들과 비슷한 소수성을 보였다. SPFPE에 의하여 형성된 SAMs 표면은 OTS와 FOTS와 유사한 0.3 nm의 표면 거칠기를 가지나 상대적으로 유연한 PFPE 주사슬의 움직임으로 인하여 OTS에 비하여 50%정도 마찰력이 줄어드는 우수한 마찰 특성을 보였다.
Silane modified perfluoropolyethers (SPFPE) was synthesized as a self-assembled mono-layers (SAMs) thin film for micro-electro mechanical system (MEMS). SPFPE was compared to the Perfluoropolyethers (PFPE) as well as octadecyltrichlrorsilane (OTS) and perfluorooctyltrichlorosilane (FOTS) with respect to the development of hydrophobicity in the SAMs surface. SPFPE shows less hydrophobicity than those of OTS and FOTS. Thermal annealing of SPFPE SAMs resulted in the enhancement of hydrophobicity as much as those of OTS and FOTS. The SAMs formed from SPFPE were found to be similar as OTS and FOTS SAMs with smooth Ra values of 0.3 nm. However, the flexible chain mobility of SPFPE resulted in 50% reduction as much as the friction force in OTS.
Keywords:self-assembled monolayers;silane modified perfluoropolyether;MEMS;contact angle;silicon substrates
  1. Bhushan B, Handbook of Micro/Nano Technology, CRS Press, Boca Raton, Florida, U.S.A. (1995)
  2. Komvopoulos K, Wear, 200, 305 (1996) 
  3. Mastrangleo CH, Tribol. Lett., 3, 223 (1997) 
  4. Liu HW, Ahmed SIU, Scherge M, Thin Solid Films, 381(1), 135 (2001) 
  5. Deng K, Collins RJ, Mehregany M, Sukenik CN, J. Electrochem. Soc., 142(4), 1278 (1995) 
  6. Cha KH, Kim DE, Wear, 251, 1169 (2001) 
  7. Banga R, Yarwood J, Morgan AM, Evans B, Kells J, Langmuir, 11(11), 4393 (1995) 
  8. Choi J, Kawaguchi M, Kato T, J. Appl. Phys., 91, 7574 (2002) 
  9. Srinivasan U, Houston MR, Howe RT, Maboudian R, J. MEMS, 7, 252 (1998)
  10. Schmidt H, J. Non-Cryst. Solids, 178, 302 (1994) 
  11. DeGrange JD, Markham JL, Kurkjian CR, Langmuir, 9, 1749 (1993) 
  12. Hair ML, Tripp CP, Colloids Surf. A: Physicochem. Eng. Asp., 105, 95 (1995) 
  13. Singh S, Sasaki DY, Cesarano J, Hurd AJ, Thin Solid Films, 339(1-2), 209 (1999) 
  14. Ashurst WR, Yau C, Carraro C, Lee C, Kluth GJ, Howe RT, Maboudian R, Sens. Actuators A-Phys., 91, 239 (2001) 
  15. Sung MM, Kluth GJ, Yauw OW, Maboudian R, Langmuir, 13(23), 6164 (1997) 
  16. Park S, Chun S, Perettie DJ, Talk FE, Kang HJ, Polym.(Korea), 23(1), 73 (1999)
  17. Zhao X, Bhushan B, Proc. Instn. Mech. Engrs., 214, 535 (2000)