The morphology of surfaces modified pi-conjugated arylsilanes depends on various parameters such as the nature and the number of the hydrolyzable functions or the length of the aromatic segment. The grafting of phenyltrichlorosilane and phenyltrimethoxysilane leads to multilayers even when the reactions are carried out at 0 degreesC, the films obtained from phenyltrichlorosilane being much thicker than the one obtained from phenyltrimethoxysilane. A submonolayer is obtained using phenyltriethoxysilane. Whereas the trifunctional phenyltrichlorosilane forms an inhomogeneous multilayer, the difunctional phenyldichlorosilane (PhSiHCl2) and the monofunctional phenylchlorosilane (PhSiH2Cl) (the SiH bond is not reactive under these experimental conditions) deposit as dense homogeneous monolayers. For these two phenylchlorosilanes, the surface analytical data are similar except for contact angle measurements, which can be explained by a different orientation of the phenyl group at the surface. Concerning the influence of the length of the aromatic segment on the quality of the film, styryltrimethoxysilane and methylstilbenyltrimethoxysilane lead to dense monolayers indicating that adding a short group such as the vinyl group is sufficient to induce an organization between aromatic groups and to achieve a dense monolayer.