The cell adhesion and spreading behavior on surfaces of poly(ethyleneterephtalate) and poly(hydroxymethylsiloxane) micropatterned by focused 15 keV Ga+ beams has been studied. It has been found that while no modification in the cell adhesion process could be observed for unirradiated and irradiated areas on the patterned surfaces, in the case of polyhydroxymethylsiloxane the cell adhesion process is basically confined within the irradiated areas and a clear dependence of the cell ordering on the lateral size of the irradiated areas is observed. The results are discussed in terms of the specific spatially resolved chemical modification induced by Ga+ irradiation onto the two different polymers. Thus, the irradiation-induced modification of composition, functional groups concentration, surface free energy, and nanoscale morphology have been studied by means of x-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, contact angle, and atomic force microscopy. The cell adhesion and spreading behavior was found to nicely correlate with the increase of the acid-base component gamma(AB) of the surface free energy and more particularly with the dramatic increase of the Lewis basic electron-donor term. (C) 2003 American Vacuum Society.