In this communication we describe a titanium alloy material that has an excellent low outgassing property,whose rate is lower than 6 X 10(-13) Pa m s(-1). This value is much lower than that of standard vacuum materials by three orders of magnitude under the same ordinary pretreatments. In our titanium alloy a natural TiO2 thin layer on the surface acts as an enhanced diffusion channel for dissolved gases, mainly hydrogen, consequently very quick evacuation of gas near the surface gives a very low outgassing rate. (C) 2003 American Vacuum Society.