ZnGa2O4:Mn phosphor thin films were deposited on ZnO:Ga/glass, ZnO:Al/glass, ZnO/ITO/glass, and ITO/glass by rf magnetron sputtering. Effects of substrates and heat treatment on the structural and luminescent properties were investigated. The surface morphology, growing behavior, and luminescent properties of thin films depend on the crystallinity of the substrates. Thin film phosphors were heat-treated in a N-2+vacuum, vacuum (similar to10(-3) Torr), and air atmosphere, respectively. The annealing conditions did not affect the surface morphology and crystallinity of the films. However, the Ga/Zn atomic ratios and luminescent characteristics were dependent on these conditions. (C) 2004 American Vacuum Society.