Thin Solid Films, Vol.442, No.1-2, 86-92, 2003
Composite Ag/C : H films prepared by DC planar magnetron deposition
Composite Ag/C:H films were deposited by means of an unbalanced magnetron operated in a gas mixture of argon and n-hexane. We used a gradual coating ('poisoning') of the target by a carbonaceous layer to deposit films with decreasing rate of silver sputtering. Rate of deposition of the films decreases with the covering of the magnetron target. XPS measurements were performed with the aim to study the composition of the films. The surface energy of the films was estimated from static water and formamide contact angles, which were measured using the droplet method. Values of the water contact angle were found to be in the range from 88degrees to 66degrees. Absorption spectra in the visible, near UV and IR region were studied as a function of silver concentration. FTIR spectroscopy was employed to investigate the composite films and monitor their aging. CH2/CH3 stretching and deformation bands are present in all infrared spectra of the films. Evolution of the FTIR spectra with aging shows a high influence of concentration and size of the metallic inclusions on the absorption bands of the carboxyl and carbonyl groups. (C) 2003 Elsevier B.V. All rights reserved.
Keywords:plasma processing and deposition;hydrocarbons;silver;Fourier transform infrared spectroscopy (FTIR)