Hydrogen-selective Pd membranes can be used to improve the conversion of dehydrogenations, steam reforming, and the water gas shift reaction. The application of these membranes on a large scale is prohibited by the costs of the existing membranes, requiring membranes with a much higher permeability. In this paper we describe the manufacturing of Pd and Pd/Ag membranes using microsystem technology. These membranes exhibit fluxes that can be a factor of 10 higher than the fluxes obtained using porous supports. Despite the thin Pd and Pd/Ag layers applied, these membranes are pinhole-free.