Low-k dielectric films based on an inorganic polymer, FOx(R) flowable oxide from Dow-Corning Corporation, have been examined. The electric field dependence of the leakage current appears consistent with Poole-Frenkel bulk-limited conductivity. The beta parameter value appropriate to the Poole-Frenkel theory is at least 120% larger than the experimentally determined value. Comparison between measurements obtained using Al and Hg electrodes confirms that Poole-Frenkel conduction is in fact dominant. On this basis a typical field-independent trap depth in the range 0.09-0.14 eV is deduced, and the low field conductivity is found to be 1.2 x 10(-16)- 5.7 x 10(-14) S cm(-1). The role of moisture adsorption is discussed. (C) 2004 The Electrochemical Society.