We report on the surface proputies of the films composed of polysiloxane and trimethoxyperfluorosilane(TMPFS). In this study, the PFS was introduced in order to enhanced soil-proof propertyy of siloxane polymer. Surface properties of the mixture were investigated. Contact and sliding angle measurements were done in order to investigate the anti-soil, and soil release properties, respectively. The surface free energy of siloxane polymer was decreased remarkably by incorporation of small quantity of PFS with the increment of contact angle and decrease of sliding angle. The TMPFS/Polysiloxane mixture film many provide a great opportunity for the antisoil applications.