화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Journal of Industrial and Engineering Chemistry, Vol.10, No.7, 1242-1256, December, 2004
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Semiconductor Tin Oxide Gas Sensors: From Bulk to Thin Films
Imatiaz Sirajddin Mulla1, 2, †, Niranjan Suryakant Ramgir1, 2, Young Kyu Hwang3, 4, and Jong-San Chang3, 4
  • 1Physical and Materials Chemistry Division, National Chemical Laboratory, Pune 411008, India
  • 2Catalysis Center for Molecular Engineering,, Korea Research Institute of Chemical Technology (KRICT), P.O.Box 107-, Yusung, Daejeon 305-600, India
  • 3Catalysis Center for Molecular Engineering, Korea Research Institute of Chemical Technology (KRICT), P.O.Box 107-, Yusung, Daejeon 305-600, India
  • 4, India
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Tin oxide an n-type semiconductor gas sensing material is widely accepted and under investigation in practically every form, from bulk to nano-structure. It is necessary to understand the ordering of crystal structure, morphology and arrangement of grains, importance of the surface effects and grain boundaries, and more importantly the working principle in order to visualize their potential as a sensor and electronic material. Therefore, it is necessary to consider each factor governing the sensitivity and selectivity prior to designing the sensor device. An ideal sensor with high mobility of conduction electrons and satisfactory stability needs fabrication of a highly porous, thin sensing body with a proper selection of doping element that can enhance surface reactions/adsorption of sensing gas. In the present report, we have tried to describe the recent progress in the tin oxide based gas sensors with some of our own findings.
Keywords:tin oxide;thin film;dopant;sensitivity and sensor
  1. Terms and Definitions in Industrial Process Measurement and Control (IEC Draft 65/84), International Electrotechnical Committee (1982)
  2. Gopel W, Hesse WJ, Zemel JN, Sensors: A Comprehensive Survey, Vol. I, Fundamental and General Aspect, Weinheim Verlagsgesellschaft mbH, 3-4 (1989)
  3. Butler MA, Appl. Phys. Lett., 45, 1007 (1984)
  4. Seiyama T, Yamazoe N, Avavi H, Sens. Actuators, 4, 85 (1983)
  5. Dubbe A, Sens. Actuators B-Chem., 88, 138 (2003)
  6. Guardia DL, Biochemical Sensors: The State of The Art, Miguel Mikrochim. Acta, 120, 243 (1995)
  7. Watson J, Sens. Actuators B-Chem., 8, 173 (1992)
  8. Brattain WH, Bardeen J, Bell. System Technical Journal, 32, 1 (1952)
  9. Morrison SJ, J. Phys. Chem., 57, 860 (1953)
  10. Seiyama T, Kato A, Fujishi K, Nagatini M, Anal. Chem., 34, 1502 (1962)
  11. Taguchi N, Japanese Patent, 45, 38200 (1962)
  12. Taguchi N, US patent no. 3631,367 (1970)
  13. Loh JC, Japan Patent 43-29560 (1967)
  14. Gopel W, Schierbaum KD, Sens. Actuators B-Chem., 26, 1 (1995)
  15. Ichinose H, Am. Ceram. Soc. Bull., 64, 1581 (1985)
  16. Sait S, Miyayama M, Koumoto K, Yanagida H, J. Am. Ceram. Soc., 68, 40 (1985)
  17. Janata J, Bezegh A, Anal. Chem., 60, 62 (1988)
  18. Moseley PT, Tofield BC, Mater. Sci. Technol., 1, 505 (1985)
  19. Raju AR, Rao CNR, Sens. Actuators B-Chem., 365 (1991)
  20. Zakrzawska K, Thin Solid Films, 391, 229 (2001)
  21. Solis JL, Lantto V, Sens. Actuators B-Chem., 48, 322 (1980)
  22. Cabot A, Dieguez A, Romano-Rodriguez A, Morante JR, Barsan N, Sens. Actuators B-Chem., 79, 98 (2001)
  23. Wada K, Egashira M, J. Ceram. Soc. Jpn., 106, 84 (1998)
  24. Sberveglieri G, Groppelli S, Nelli P, Lantto V, Torvela H, Romppainen P, Leppavuori S, Sens. Actuators B-Chem., 79 (1990)
  25. Lee DD, Chung WY, Sens. Actuators B-Chem., 20, 301 (1989)
  26. Sberveglieri G, Benussi P, Coccoli G, Groppelli S, Nelli P, Thin Solid Films, 186, 349 (1990)
  27. Klober J, Ludwig M, Scheider A, Sens. Actuators B-Chem., 3, 69 (1991)
  28. Mulla IS, Soni HS, Sinha APB, J. Mater. Sci. Lett., 21, 1280 (1986)
  29. Ahmad A, Walsh J. Wheat AT, Sens. Actuators B: Chem., 93, 538 (2003) 
  30. Xu C, Tamaki J, Miura N, Yamazoe N, Sens. Actuators B-Chem., 3, 147 (1991)
  31. Teoh LG, Hon YM, Shieh J, Lai WH, Hon MH, Sens. Actuators B-Chem., 96, 219 (2003)
  32. Hyodo T, Abe S, Shimizu Y, Egashira M, Sens. Actuators B-Chem., 93, 590 (2003)
  33. Honma I, Sasabe H, Zhou HS, Mater. Res. Soc. Symp. Proc., 457 (Nanophase and Nanocomposite Materials II), 525 (1997)
  34. Liu CH, Zhang L, He YJ, Thin Solid Films, 304(1-2), 13 (1997)
  35. Hiratsuka N, Kobayashi H, Uchida H, Katsube T, J. Ceram. Soc. Jpn., 104, 1048 (1996)
  36. Roman J, Fabian JC, Labeau M, Delabouglise G, Vallet-Regi M, J. Mater. Res., 12, 560 (1997)
  37. Maekawa T, Tamaki J, Miura N, Yamazoe N, Sens. Actuators B-Chem., 9, 63 (1992)
  38. Rom ppainen P, Lantto V, Leppavuori S, J. Phys. Chem. B, 105, 13 (2001)
  39. Romppainen P, Lantto V, Leppavuori S, Sens. Actuators B-Chem., 1, 73 (1990)
  40. Yamazoe N, Muto Y, Seiyama T, Hyomen Kagaku, 5, 55 (1984)
  41. Anno Y, Maekawa T, Tamaki J, Asano Y, Hayashi K, Miura N, Yamazoe N, Sens. Actuators B-Chem., 24, 623 (1995)
  42. Ryu H, Park B, Akbar SA, Lee W, Hong K, Seo Y, Shin D, Park J, Choi G, Sens. Actuators B-Chem., 96, 717 (2003)
  43. Akiyama M, Zhang Z, Tamaki J, Miura N, Yamazoe N, Harada T, Sens. Actuators B-Chem., 13-14, 619 (1993)
  44. Maekawa T, Tamaki J, Miura N, Yamazoe N, Chem. Lett., 639 (1992)
  45. Solis JL, Saukko S, Kish LB, Grangvist CG, Lantto V, Sens. Actuators B-Chem., 77, 1 (2001)
  46. Shimizu Y, Egashira M, Takao Y, J. Electrochem. Soc., 135, 2539 (1988)
  47. Takada T, Komatsu K, Dig. Tech. Papers of Transducers, 693, 48 (1987)
  48. Yamaura H, Tamaki J, Moriya K, Miura N, Yamazoe N, J. Electrochem. Soc., 143(2), L36 (1996)
  49. Anno Y, Tamaki J, Asano Y, Hayashi K, Miura N, Yamazoe N, Hyomen Kagaku, 16, 474 (1995)
  50. Matsuzawa T, Sugai T, Okuda A, Anal. Chem. Symp. Ser., 17, 108 (1983)
  51. Obayashi H, Sakurai Y, Gejo T, J. Solid State Chem., 17, 1999 (1976)
  52. Shimizu Y, Maekawa T, Nakamura Y, Egashira M, Sens. Actuators B-Chem., 46, 163 (1998)
  53. Lu F, Chen S, Peng S, Wang X, Xuebao YD, Ziran Kexueban, 19, 109 (1997)
  54. Sberveglieri G, Sens. Actuators B-Chem., 6, 239 (1992)
  55. McAleer JF, Maignan A, Moseley PT, Williams DE, J. Chem. Soc.-Faraday Trans., 1, 783 (1989)
  56. Raju AR, Rao CNR, Sens. Actuators B-Chem., 3-4, 365 (1991)
  57. Wang ZL, Adv. Mater., 15, 432 (2003)
  58. Munnix S, Schmeits M, Phys. Rev., B, 27, 7624 (1983) 
  59. Mizusaki J, Koinuma H, Shimoyama JI, Kawasaki M, J. Solid State Chem., 8, 443 (1990)
  60. Sherwood PMA, Phys. Rev., B, 41, 10151 (1990) 
  61. Yamazoe N, Fujigami J, Kishikawa M, Seiyama T, Surf. Sci., 335, 86 (1979)
  62. Akbar SA, Younkma LB, J. Electrochem. Soc., 144, 750 (1997)
  63. McAleer JF, Mosley PT, Norris JOW, Williams DE, J. Chem. Soc.-Faraday Trans., 1, 1323 (1987)
  64. Yamazoe N, Sakai G, Shimanoe K, Catal. Surv. Asia, 7, 1 (2003)
  65. Chaudhary VA, Mulla IS, Vijayamohanan K, Sens. Actuators B-Chem., 50, 45 (1998)
  66. William DE, Sens. Actuators B-Chem., 57, 1 (1999)
  67. Phani AR, Manorama S, Rao VJ, Appl. Phys. Lett., 66, 3489 (1995)
  68. Beckar T, Ahlers S, Bosch-v.Braunmuhl C, Muller G, Kiesewetter O, Sens. Actuators B-Chem., 77, 55 (2001)
  69. Morrison SR, Sens. Actuators B-Chem., 2, 329 (1982)
  70. Gopel W, Schierbaum KD, Sens. Actuators B-Chem., 26, 1 (1995)
  71. Heiland G, Sens. Actuators B-Chem., 2, 343 (1982)
  72. Zan Z, Yibiao Cailiao, 18, 59c (1987)
  73. Katasuki A, Fukui K, Sens. Actuators B-Chem., 52, 30 (1998)
  74. Kodakari N, Katada N, Niwa M, J. Chem. Soc. Chem. Commun., 6, 623 (1995) 
  75. Chaudhary VA, Mulla IS, Sainkar SR, Belhekar AA, Vijayamohanan KP, Sens. Actuators A-Phys., 65, 197 (1998)
  76. Niranjan RS, Chaudhary VA, Sainkar SR, Patil KR, Vijayamohanan KP, Mulla IS, Sens. Actuators B-Chem., 79, 132 (2001)
  77. Chaudhary VA, Mulla LS, Vijayamohanan K, J. Mater. Sci. Lett., 16(22), 1819 (1997)
  78. Chaudhary VA, Mulla IS, Vijayamohanan KP, Sens. Actuators B-Chem., 50, 45 (1998)
  79. Chaudhary VA, Mulla IS, Vijayamohanan KP, J. Mater. Res., 1, 14 (1999)
  80. Jianping L, Yue W, Xiaoguang G, Qing M, Li W, Jinghong H, Sens. Actuators B-Chem., 65, 111 (2000)
  81. Glassford KM, Chelikowsky JR, Phys. Rev., B, 47, 1732 (1993) 
  82. Chaudhary VA, Mulla IS, Vijayamohanan K, Sens. Actuators B-Chem., 55, 127 (1999)
  83. Sathaye SD, Patil KR, Paranjape DV, Mitra A, Awate SV, Mandale AB, Langmuir, 16(7), 3487 (2000)
  84. Schwalke U, Parmeter JE, Weinberg WH, Surf. Sci., 178, 1158 (1986)
  85. Zhang C, Hu P, Alavi A, J. Am. Ceram. Soc., 121, 7931 (1991)
  86. Over H, Applied Physics A: Materials Science & Processing, 75, 37 (2002)
  87. Wang ZL, Kang ZC, Functional and smart materials-structural evolution and structure analysis, Plenum Press, New York (1998)
  88. Xia Y, Yang P, Sun Y, Wu Y, Mayers B, Gates B, Yin Y, Kim F, Yan H, Adv. Mater., 15, 353 (2003)
  89. Gopel W, Schierbaum KD, Sens. Actuators B-Chem., 26-27, 1 (1995)
  90. Ansari SG, Boroojerdian P, Sainkar SR, Karekar RN, Aiyer RC, Kulkarni SK, Thin Solid Films, 295(1-2), 271 (1997)
  91. Scott RWJ, Yang SM, Chabanis G, Coombs N, Williams DE, Ozin GA, Adv. Mater., 13, 1468 (2001)
  92. Dai ZR, Gole JL, Stout JD, Wang ZL, J. Phys. Chem. B, 106(6), 1274 (2002)
  93. Zheng M, Li G, Zhang X, Huang S, Lei Y, Zhang L, Chem. Mater., 13, 3859 (2001)
  94. Sun SH, Mang GW, Zhang MG, An XH, Wu GS, Zhang LD, J. Phys. D-Appl. Phys., 37, 409 (2004)
  95. Law M, Kind H, Messer B, Kim F, Yang P, Angew. Chem. Inter., 41(13), 2405 (2002) 
  96. Wang YL, Jiang XC, Xia YN, J. Am. Chem. Soc., 125(52), 16176 (2003)
  97. Kolkamov A, Zhang Y, Cheng G, Moskovits M, Adv. Mater., 15, 997 (2003)
  98. Niranjan RS, Mulla IS, Vijayamohanan KP, J. Phys. Chem. B, 108, 14815 (2004)