The hydrolytic decomposition of CF4 has been conducted on gallia promoted alumina (Ga-Al oxide) catalysts at 803-903 K and 0.1 MPa. Steady state activity on 20% Ga-Al oxide was 15 times of that on Ce 10%-AlPO4 catalyst, on which the highest activity has been reported. The catalytic activity was further improved by incorporation of sulfate anion in Ga-Al oxide and by applying sol-gel method in preparation of the catalyst. XRD spectra of Ga-Al oxides showed a shift of diffraction peaks assigned to gamma-alumina toward lower angles, indicating the formation of gallia-alumina solid solution. In situ FT-IR of pyridine adsorption spectra of Ga-Al oxides showed peaks solely attributable to Lewis acid (L-acid) sites at 1445-1455, ca. 1495, 1577, ca. 1594, and ca. 1622cm(-1). The steady state catalytic activities increased with increasing peak areas at 1446 or 1622 cm(-1) of Ga-Al oxides with various Ga%, suggesting participation of Lewis acid sites into the reaction. It is demonstrate from surface area measurements of Ga-Al oxide catalyst before and after the reaction that not only higher catalytic activity but also higher catalyst stability were observed on Ga-Al oxide, Ga-Al oxide with sulfate, and Ga-Al oxide prepared by sol-gel method than on their parent oxides of alumina, Ga-Al oxide, and Ga-Al oxide prepared by incipient wetness method, respectively. (C) 2004 Published by Elsevier B.V.