A microreactor based on a micro-structured electrode (MSE) system is presented. With radio frequency electric power applied to the interdigitated, comb-like capacitor structure a homogeneous plasma is driven at atmospheric pressure with low ignition voltages due to small electrode gaps. The MSE is micromachined by plating nickel onto alumina ceramics. A micromachined Foturan(R) structure with inlet and outlet channels for the gas flow serves as a reaction chamber. The design of the reactor cell is arranged in a 4 x 4-array in a multireactor system. The performance of the reactor is modeled with computational fluid dynamics (CFD), used to improve the reactor design. Experiments show that CF4 decomposition rates of over 70% can be achieved at atmospheric pressure. (C) 2004 Elsevier B.V. All rights reserved.