Parylenes belong to a family of polymers that have been investigated for use in electronic and medical applications. The photooxidation of these materials is of interest both to prevent degradation and to induce targeted chemical changes. This article describes a transport and reaction model for the photooxidation of parylenes. This model is based on existing polymer photooxidatian mechanisms that have been adapted to this system. The model has been compared with existing parylene photooxidation data for this system and shows qualitative agreement with surface oxidation profiles and oxidation depth profiles. On the basis of the results of the model comparison, it has been determined that the key parameters that appear to affect the photooxidation of parylenes are the diffusion coefficient of oxygen in these films and the concentration of oxygen initially present in these films. (C) 2004 Wiley Periodicals, Inc.