In this paper we present an approach for predicting polishing rate with the main parameters in the recipe. Compared with Preston's equation, a dimensional analysis-based equation, RR = A X (DF/BP)(12) X (TR/TT)(b) X TT, was given. We used a method called "dimensional analysis" to deduce an empirical equation. We successfully correlated the polishing rate with the operational parameters. such as the turntable rotational speed, the top-ring rotational speed, downforce, and back-side pressure. For the convenience of chemical mechanical polishing (CMP) process engineers, we proposed a simple method to help predict the polishing rate. With the experimental data, the presented equation seems workable. (C) 2004 The Electrochemical Society.