화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.22, No.3, 826-830, 2004
Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switching
On-chip integration of optical switches and planar light circuits (PLCs) can greatly reduce the size, manufacturing cost, and operating cost of multicomponent optical systems. A silicon-on-insulator platform for integrating microelectromechanical system (MEMS) latching optical waveguide switches with PLCs is presented including a working example of chip scale integration of reconfigurable-optical add/drop multiplexer and X-Routers, along with details of the integrated latching MEMS optical switches. (C) 2004 American Vacuum Society.