화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.22, No.4, 1816-1819, 2004
Calibration apparatus for precise barometers and vacuum gauges
In order to calibrate highly accurate absolute pressure gauges, such as barometers and vacuum gauges, laser, or ultrasonic mercury manometers have been used. However, the complexity and cost of manometers have greatly reduced the use of this method in most calibration laboratories. As a substitute, a gas-operated pressure balance is used to calibrate precise gauges. In such cases, many commercially available pressure balances are unsuitable because the necessary exposure of the piston, cylinder, and masses to the atmosphere causes contamination problems and allows dust particles into the gap between the piston and cylinder. In this article, a weight-loading device is described that allows masses to be changed in situ without breaking the vacuum. This device makes it possible to add or remove weights easily during the calibration, thereby greatly reducing the time between observations. Using this device, we efficiently calibrated a precise quartz resonance barometer (Paroscientific, model 760-16B) over a pressure range of 940-1050 hPa and a precise vacuum gauge (MKS, CDG 100 Torr) over a pressure range of 0-100 hPa. (C) 2004 American Vacuum Society.