Recently the direct growth of carbon nanotubes (CNT) on glass substrates by thermal chemical-vapor deposition at low temperatures has been researched for the fabrication of field-emission displays. We have achieved synthesis of CNT on soda lime glass with a catalyst: FeZrN at low temperature (500-550degreesC). The FeZrN film deposited by sputtering is amorphous. However, this film changes into a crystalloid to separate out Fe fine particles by thermal treatment. This characteristic has been successfully applied to make the precursor of CNT. There is a possibility that the density and diameter of CNT can be controlled by varying the composition ratio of FeZrN. The emission from CNT has also been obtained. The turn-on electric field has been similar to2.5-3 V/mum. We have fabricated a microtriode structure and the emission has been also recognized. (C) 2004 American Vacuum Society.