An 'Aurora PLD method,' in which a magnetic field is applied to a plasma plume, was employed to grow ZnO films and to study the mechanism of crystal growth. In the Aurora PLD method, the ZnO target displayed a brighter plume in the vicinity of the magnet (near the substrate holder). The photoluminescence (PL) was double that of a conventionally PLD grown film when the Aurora PLD was used. Furthermore, when a method of Aurora PLD with Ar added was used, the PL intensity increased 3-4 times. Hall effect measurement revealed the reduction of the residual electron concentration due to Aurora PLD growth, suggesting the possible improvement of the crystallinity. These advantages of the Aurora PLD method were compared with respect to an elevated growth temperature of approximately 100 degreesC. (C) 2003 Elsevier Science B.V. All rights reserved.