Thin Solid Films, Vol.446, No.2, 172-177, 2004
Atomic layer deposition of thin films of ZnSe - structural and optical characterization
Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays. (C) 2003 Elsevier B.V. All rights reserved.