화학공학소재연구정보센터
Thin Solid Films, Vol.450, No.1, 42-50, 2004
Generalized ellipsometry for materials characterization
Ellipsometry experiments normally measure two to four parameters, which are converted to the ellipsometric parameters psi and Delta. This is usually sufficient for many samples, but more complicated situations (such as anisotropic or depolarizing samples) require more sophisticated measurements. Over the last 7 years, we have developed the two-modulator generalized ellipsometer (2-MGE), which measures eight elements of the sample Mueller matrix simultaneously either in reflection or transmission. In reflection, the 2-MGE totally characterizes light reflection from anisotropic samples, measuring the normal ellipsometry parameters, as well as the cross-polarization and depolarization effects. Applications include the determination of the spectroscopic optical functions of uniaxial materials (such as TiO2 and ZnO), and the measurement of cross-polarization from diffractive structures. In transmission, the 2-MGE completely characterizes a general linear diattenuator and retarder. Applications include the measurement of the retardation and diattenuation of film polarizers and internal electric fields in LiNbO3 and CdZnTe under bias. (C) 2003 Elsevier B.V. All rights reserved.