In this paper we show that by the analysis of 2D images collected with a laboratory X-ray microdiffractometer it is possible to non-destructively evaluate the structure, the microstructure, and the preferred orientation of films. In particular, the structural analysis of Co/Au multilayers on Si(100) deposited at different Ar pressures are reported and discussed. (C) 2003 Elsevier B.V. All rights reserved.