The deposition rates of plasma-polymerized (pp-)films of 12 acrylate derivatives (CH2=CHCOOR: substitution R is -H, -CH3, -CH=CH, -CH2CH3, -CH2CH2CH3, -(CH2)(3)CH3, -C(CH3)(3), -CH2CH(CH3)(2), -CH2(CH2)(4)CH3, -CH2CF3, -CH2CF2CF3, -CH2(CF2)(2)CF3), and 12 methacrylate derivatives (CH2=CCH3COOR': substitution R' is -H, -CH3, -CH=CH2, -CH2CH3, -CH2CH2CH3, -(CH2)(3)CH3, -C(CHA(3)) -CH2CH(CH3)(2), -CH2(CH2)(4)CH3, -CH2CF3, -CH2CF2CF3, -CH2(CF2)(2)CF3) are determined by the quartz crystal microbalance technique. Using the same polymerization conditions (100 W RF and 100 Pa vapor pressure) for the various monomers, it is found that the deposition rates were proportional to the polymerization time. The average deposition rate of pp-acrylate derivatives is larger than that of pp-methacrylate derivatives without pp-hexylacrylate. The average deposition rate of pp-fluoroalkylacrylates was higher than 7-25 times that of pp-alkylacrylate, and the average deposition rate of pp-fluoroalkylmethacrylates was higher than 10-31 times that of pp-alkylmethacrylates, respectively. The average deposition rate of pp-film depends on the chemical structure of the monomer suggesting different mechanisms under plasma-polymerization. (C) 2003 Elsevier B.V. All rights reserved.