Thermal stability, phase and interface uniformity of Ni-silicide are some key issues for NiSi Salicide technology. The improved stability of NiSi was achieved by Ni/Pt/Si and Ni/Pd/Si reaction. The increase of thermal stability can be explained by classical nucleation theory. The phase and interface uniformity of Ni-silicides formed by Ni-Si solid-state reaction were characterized by X-ray diffraction (XRD) and temperature-dependent current-voltage (I-V-T) techniques. Results show that the Schottky barrier height (SBH) inhomogeneity characteristic has strong dependence on annealing temperature for Ni-silicide formation. Deep level transient spectroscopy (DLTS) measurement shows that annealing at relatively low temperature may cause electrically active deep level defects in the film. These results show that choosing a proper annealing temperature for Ni/Si silicidation will be very important for device performance. (C) 2004 Elsevier B.V. All rights reserved.