화학공학소재연구정보센터
Thin Solid Films, Vol.464-65, 10-13, 2004
Initial oxidation process of an Si(111)-(7x7) surface studied by photoelectron spectroscopy
We have investigated the initial oxidation stage of an Si(111)-(7 X 7) surface using valence-band photoemission measurements. As the oxygen exposure increases, the intensities of the dangling bond states of adatoms (S-1) and rest atoms (S-2) decrease. Among the four oxygen-induced states, three originate from the orbitals of adsorbed oxygen species, and one originates from the dangling bonds of adatoms with more than one oxygen atom adsorbed into its back-bond. Taking the dosage-dependent intensity of this modified dangling bond state into account, we conclude that the first adsorption site of oxygen is the back-bond of an adatom. (C) 2004 Elsevier B.V. All rights reserved.