Growth control of carbon nanotubes on silicon carbide surfaces using the laser irradiation effect

Konishi H; Matsuoka H; Toyama N; Naitoh M; Nishigaki S; Kusunoki M

Thin Solid Films, Vol.464-65, 295-298, 2004

Konishi H, Matsuoka H, Toyama N, Naitoh M, Nishigaki S, Kusunoki M

We have investigated laser irradiation effects on the growth of carbon nanotubes (CNTs) on 6H-SiC(0001) surfaces. CNTs were formed densely and uniformly after annealing a 6H-SiC(0001) surface at 1700 degreesC in a vacuum, without laser irradiation. However, amorphous carbon layers were formed on the 6H-SiC(0001) surface and the CNT growth was suppressed when the surface was irradiated by the ArF excimer laser with about 10 mj/cm(2) for 5 min in air before being annealed. (C) 2004 Elsevier B.V. All rights reserved.

Keywords:nanotubes;laser irradiation;silicon carbide;transmission electron microscope