Previous Article Next Article Table of Contents Thin Solid Films, Vol.467, No.1-2, 342-342, 2004 DOI10.1016/j.tsf.2004.05.002 Export Citation Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004) Chang TC, Yan ST, Liu PT, Lin ZW, Aoki H, Sze SM Please enable JavaScript to view the comments powered by Disqus.
