화학공학소재연구정보센터
Thin Solid Films, Vol.469-470, 86-91, 2004
Growth and characterization of thick cBN coatings on silicon and tool substrates
Recently some research groups have achieved progress in the deposition of cubic boron nitride (cBN) coatings with a thickness of 2 mum and more, which is necessary for cutting tool applications. In our laboratory, thick cBN coatings were sputter deposited on silicon substrates using a boron carbide target. Following a boron carbide interlayer (few 100 nm thick), a gradient layer with continuously increasing nitrogen content was prepared. After the cBN nucleation, the process parameters were modified for the cBN film growth to a thickness of more than 2 mum. However, the transfer of this technology to technically relevant substrates, like cemented carbide cutting inserts, required some further process modifications. At first, a titanium interlayer had to be deposited followed by a more than 1-mum-thick boron carbide layer. The next steps were identical to those on silicon substrates. The total coating thickness was in the range of 3 put with a 0.5- to nearly 1-mum-thick cBN top layer. In spite of the enormous intrinsic stress, both the coatings on silicon and on cemented carbide exhibited a good adhesion and a prolonged stability in humid air. Oxidation experiments revealed a stability of the coating system on cemented carbide up to 700 degreesC and higher. Coated cutting inserts were tested in turning operations with different metallic workpiece materials. The test results will be compared to those of well-established cutting materials, like polycrystalline cubic boron nitride (PCBN) and oxide ceramics, considering the wear of coated tools. (C) 2004 Elsevier B.V. All rights reserved.