Fluidization characteristics of silicon particle system are studied by the pressure fluctuation method. The existence of fine particles in the system can improve fluidization. Silicon particles with a aide size distribution. preferably with some fines, behave as Group A particles according to Geldart classification, although the system belongs to Group B actually. The system is also approved to be suitable for organochlorosilane monomer production using a fluidized bed reactor. Experimental data obtained in this work are important, for the design and operation of commercial fluidized bed reactors for the production of organochlorosilane monomers.