Poly(3,4-ethylenedioxythiophene) (PEDOT) and chitosan structures on Si, patterned by plasticizer-assisted imprint lithography (PAIL), are examined under a variety of imprinting conditions. The stabilities of pattern dimension and chemical functionality of these polymers are presented. Thermal annealing for 5 min at 80degreesC is found to be an effective method to stabilize imprinted PEDOT patterns. Biofunctionality in chitosan as a function of imprint temperature and pressure is examined through fluorescence spectroscopy. The accessibility of the amine group of chitosan is observed to decrease for imprint temperatures above 80degreesC, whereas the chemical functionality is not affected by pressure up to 1 MPa. Fluorescence spectra of the chitosan are observed to be strong functions of exposure time to O-2 plasma. (C) 2004 American Vacuum Society.