High-quality low-temperature indium, tin oxide (ITO) thin films were deposited on polymer-reinforced ultrathin glass for flexible polymer light emitting devices (PLEDs). For a 130-mn thick ITO film, a sheet resistance of 25 Omega/sq was obtained when it was prepared at a hydrogen partial pressure of 2.6 x 10(-3) Pa. The transmittance of ITO film was above 85% over the visible spectrum. A maximum electroluminescent (EL) efficiency of 5.1 cd/A for the flexible PLEDs at an operating voltage of 5 V was obtained. The bending properties of ultrathin glass with a reinforcement polymer layer were investigated. The minimum-bending radius of reinforced glass was calculated. The improvement in the flexibility of ultrathin glass sheet due to the polymer reinforcement was clearly demonstrated. (c) 2004 Elsevier B.V. All rights reserved.