An epitaxial CaRuO3 thin film was fabricated on the (100)-SrTiO3 substrate by spin-coating an organic metal and subjecting it to successive heat treatments. Results of X-ray diffraction, reflection high-energy electron diffraction, and transmission electron microscopy indicate that the growth is pseudomorphic and the [001] axis of the CaRuO3 film is perpendicular to the (100) plane of the SrTiO3 substrate and its pseudocubic axes align parallel to those of the SrTiO3 crystal. The epitaxial CaRuO3 thin film has a similar transport property to that of bulk CaRuO3 crystal. (c) 2004 Elsevier B.V. All rights reserved.