A hybrid replication technique is described for complex alloy systems whereby the surface is etched to reveal the microstructure of the metallic phases prior to producing an extraction replica. By applying this approach to the Ni-based superalloy IN100, it has been shown that the inert carbide and boride particles can be extracted for analysis in the TEM whilst retaining information about their location with respect to the metallic phases in the alloy. This approach is particularly useful for studying the effects of inert particles on microstructural evolution, such as pinning effects during grain growth. (c) 2005 Springer Science + Business Media, Inc.