Journal of Vacuum Science & Technology B, Vol.23, No.3, 1041-1046, 2005
Nanostructured carbon-metal composite films
Diamondlike carbon-silver and diamondlike carbon-titanium nanocomposite films with thicknesses greater than one mu m were deposited on Ti-6Al-4V alloy substrates using a multicomponent pulsed laser deposition process. Z-contrast scanning transmission electron microscopy (STEM-Z) and electron energy loss spectroscopy (EELS) were used to determine film microstructure and carbon bonding, respectively. Self-assembled silver nanodot arrays were observed in the diamondlike carbon-silver films, and alternating titanium carbide/diamondlike carbon nanolayers were observed in the diamond-like carbon-titanium films. Scratch testing demonstrated good adhesion of diamondlike carbon-metal nanocomposite films to the Ti-6Al-4V alloy. Nanoindentation testing of the diamondlike carbon-metal films demonstrated excellent hardness and modulus values, within the range of 35 GPa and 350 GPa, respectively. Diamondlike carbon-metal composite films have numerous potential applications, including use in machine tools, medical prostheses, and electronic devices. (c) 2005 American Vacuum Society.