Molecular-beam epitaxy (MBE) most often involves the use of highly toxic and combustible materials, which may subject maintenance personnel to increased health risks. In our efforts to reduce these hazards, we describe the use of inert gas maintenance equipment and procedures that can be employed during the opening of MBE growth chambers. Our operations involve the use of nitrogen-purged glovebags that are sealed over the open port of the growth chamber, wherein applicable tasks are performed through appropriate gloveports of the glovebag. We also describe the associated equipment utilized inside of the glovebags, which aid in the removal of the substrate manipulator and effusion cells. The benefits of reducing the exposure of air to the growth chamber are observed after a bakeout of 145 h, wherein the AsO partial pressure within the growth chamber was a factor of 10 lower due to our inert gas maintenance procedures than without. The use of these glovebags allows us to both terminate our bakeout approximately 72 h earlier and to experience nearly a 35% improvement in the photoluminescence intensity therefrom. (c) 2005 American Vacuum Society.