화학공학소재연구정보센터
Thin Solid Films, Vol.486, No.1-2, 63-66, 2005
Transport properties of ultrathin oxide films and nanostructures
We have studied the transport properties of thin LaTiO3 films, grown on NdGaO3 and SrTiO3 substrates. In case of films gown on NdGaO3 we see a sharp increase of filrn resistivity when the film thickness drops below 18 run. This appears to Correspond to a surface depletion layer in the films. We could avoid the detrimental effects of surface states by growing LaTiO3 films on SrTiO3 substrates and covering the LaTiO3 layers with a SrTiO3 cap layer. In this case we succeeded in fabricating isolated LaTiO3 layers, sandwiched between SrTiO3, that remained metallic down to 4 K. This work shows that it is feasible to use the LaTiO3/SrTiO3 system for growing metallic nanostructure arrays. (c) 2005 Published by Elsevier B.V.