We have developed a coating technology to reduce the moisture permeation rate through a polycarbonate plastic film substrate to below 1 X 10(-5) g/m(2)/day using plasma-enhanced chemical vapor deposition. Unlike other ultrahigh barrier (UHB) coatings comprised of inorganic and organic multilayers, our UHB coating comprises a graded single hybrid layer of inorganic and organic materials. Hardness and modulus of the inorganic and the organic materials are tailored such that they are similar to those of typical glass-like materials and thermoplastics, respectively. In this barrier structure, the composition is periodically modulated between the inorganic and the organic materials, but instead of having distinctive interfaces between two materials, there are "transitional" zones where the coating composition changes continuously from one material to another. Our UHB coating also has superior visible light transmittance and color neutrality suitable for the use of display and lighting device substrates. (c) 2005 American Vacuum Society.