Using a newly developed pulsed dc sputtering source with unbalanced magnetrons, we deposited advanced inorganic functional thin films such as TiO2, TiN, and TiO2/TiN/TiO2 on glass at 200 degrees C at rates 3 to 4 times greater than those deposited by conventional dc sputtering. The TiO2(101) and TiN(100) thin films were stoichiometric and polycrystalline but. highly oriented. The TiO2 films showed high transmittances (90%) in the visible range. The TiN films showed very high reflectances (70%) in the infrared region. However, both transmittance and reflectance are strongly influenced by the thickness and surface roughness. Multilayer films of TiO2/TiN/TiO2 were also deposited on glass, and exhibited good optical properties. The best transmittances (85%) and reflectances (80%) were obtained with a thin film with TiO2(370 nm)/TiN(22 nm)/TiO2(450 nm)/glass structure. The high IR reflectance suggests the as-grown multilayer film can be used as a heat mirror. (c) 2005 American Vacuum Society.