Effects of irradiation of 1 MeV electrons or Co-60 gamma-quantum and nanostructuring on CdSxSe1-x solid solution layers, affecting their influence on the fluctuations of the potential relief, were studied in this paper. The films were deposited onto textured (by thin silver sublayer) and untextured substrates and characterized by light conductance using the photosensitivity technique with light-emitting diodes for the excitation of the films conductance. The structure properties of the manufactured films were analyzed using SEM. (C) 2005 Elsevier B.V. All rights reserved.