화학공학소재연구정보센터
Thin Solid Films, Vol.487, No.1-2, 255-259, 2005
Inter-grain coupling effects on Coulomb oscillations in dual-gated nanocrystalline silicon point-contact transistors
Inter-grain electron-coupling effects are investigated at 4.2 K in dual-gated, point-contact, single-electron transistors fabricated in nanocrystalline silicon. The nanocrystalline silicon film is similar to 40 nm thick, with grains similar to 10-30 nm in size. The point-contact transistor channel is similar to 30 nm x 30 nm x 40 nm in size, with two side-gates. Only a few grains exist within the channel and different grains contribute in varying degrees to the device conduction. By modifying the inter-grain coupling using selective oxidation of the grain boundaries, both electrostatic and wavefunction-coupling effects can be observed in the Coulomb oscillations vs. the two gate voltages. (C) 2005 Elsevier B.V. All rights reserved.