화학공학소재연구정보센터
Thin Solid Films, Vol.488, No.1-2, 1-8, 2005
Corrosion resistance of CrN/NbN superlattice coatings grown by various physical vapour deposition techniques
The corrosion and tribological performance of CrN/NbN superlattice coatings deposited by the techniques of unbalanced magnetron (UBM) sputtering, steered cathodic arc evaporation, and the combined steered cathodic arc and UBM sputtering, i.e. arc-bond sputtering (ABS), have been studied. In corrosion tests, the coatings grown by the ABS technique were superior to those grown by either UBM sputtering or arc evaporation with clear passivation behaviour and low corrosion current densities of 10(-8) A-cm(-2). In tribological tests, the lowest coefficient of friction mu = 0.3 was shown by the arc evaporated coating whereas the CrN/NbN deposited by the ABS technique achieved the lowest dry sliding wear coefficient of K-c = 5.0 x 10(-15) m(3.)N(-1.)m(-1). The microstructure of the coatings was investigated by cross-sectional transmission electron microscopy, X-ray diffractometry and energy dispersive X-ray spectroscopy, and was related to the corrosion and the tribological behaviour. (c) 2005 Elsevier B.V All rights reserved.