Multilayered FeSiB/Cu/FeSiB films with a meander structure were fabricated by magnetron sputtering on thin glass substrate, and the stress-impedance (SI) effects in the multilayered FeSiB/Cu/FeSiB films were studied in the frequency range of 1-40 MHz for different film thicknesses of FeSiB film and Cu layer. Experimental results showed that the values of SI ratio increased with the deflection of the layered FeSiB/Cu/FeSiB films at high frequencies, and a large negative SI ratio of -17.3% for a frequency of 5 MHz at the deflection of I mm was obtained in the multilayered FeSiB/Cu/FeSiB films with a thicker FeSiB film, which was very attractive for the applications of stress sensors. (c) 2005 Elsevier B.V. All rights reserved.