Measurement of the mechanical properties of nanoscale polymeric films is important for the fabrication and design of nanoscale layered materials. Nanoindentation was used to study the viscoelastic deformation of low modulus, ultrathin polymeric films with thicknesses of 47, 125 and 3000 nm on a high modulus substrate. The nominal reduced contact modulus increases with the indentation load and penetration depth due to the effect of substrate, which is quantitatively in agreement with an elastic contact model. The flow of the nanoscale films subjected to constant indentation loads is shear-thinning and can be described by a linear relation between the indentation depth and time with the stress exponent of 1/2. (c) 2005 Elsevier Ltd. All rights reserved.