A strategy based on heat-deformable monolayer polymer (polystyrene) colloidal template and precursor solution-dipping is presented to fabricate large-scale nanopillar arrays. In the method, the appropriate heating time of the polymer colloidal templates is a key factor. Fe2O3 and silica hexagonal periodic triangular prism nanopillar arrays with an aspect ratio of about 1.5:1 were successfully fabricated. This route is also applicable for synthesis of other material nanopillar arrays and opens a new way to create patterned 1D nanostructures for applications in sensor arrays, piezoelectric antenna arrays, optoelectronic devices, superhydrophobic and self-cleaning surfaces. (c) 2005 Elsevier Ltd. All rights reserved.