The electrical properties of 50 nm thick metallophthalocyanine films, prepared by organic molecular beam epitaxy (OMBE) on interdigitated electrodes, were studied with DC current-voltage measurements and impedance spectroscopy. The transition from Ohmic behavior at low voltages to space-charge-limited conductivity (SCLC) at higher voltages depends on the metal electrode (Pt, Pd, and Au), but does not correlate with the work function of the electrode. Impedance spectroscopy studies show the coexistence of low- and high-frequency traps in the thin film devices, and the contribution of low-frequency traps associated with Ohmic behavior diminishes at higher bias. Although device resistances are strongly influenced by the electrode material, and vary by a factor of over 300, the relative chemical sensor responses on exposure to dimethyl methylphosphonate (DMMP), methanol, water, or toluene vapors are similar for CoPc on Pt, Pd, and An electrodes when these devices are operated in the SCLC regime at room temperature. When the devices are operated at voltages where the low-frequency interfacial traps are filled, the sensor response to analyte becomes uniform and reliable regardless of the specific interfacial electrode contact.