화학공학소재연구정보센터
Chinese Journal of Chemical Engineering, Vol.14, No.1, 8-14, 2006
Simulation of heat transfer and oxygen transport in a Czochralski silicon system with and without a cusp magnetic field
Simulations of heat transfer and oxygen transport during a Czochralski growth of silicon with and without a cusp magnetic field were carried out. A finite volume method with a low-Reynolds number K-epsilon model proposed by Jones-Launder was employed. The numerical results were compared with the experimental data in the literature. It is found that the calculated results are in good agreement with the experimental data.